Abstract
The effect of Al203 atomic layer deposition (ALD) nanocoatings on the thermo-mechanical behavior of Au/Si microelectromechanical systems (MEMS) structures was discussed. The gold/polysilicon (Au/Si) beam structures were fabricated using the commercially available multi-user MEMS process. It was found that the first thermal cycle of an Au/Si cantilever beam with comparable film thicknesses showed significant nonlinearity and inelasticity in curvature-temperature space.
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