Abstract
A study of the suppression of inelastic deformation in multilayer thin film microstructures by alumina nanocoatings was carried out. It was found that while the 40-nm-thick coating had a small effect on the thermoelastic response of the microstructure, it significantly reduced the extent of inelastic deformation during the isothermal hold. The curvature evolution with time was modeled using the assumption that the inelastic deformation mechanism can be described by a power law, ε=Aσ n, and that the polysilicon and alumina deform elastically. For the uncoated microstructures the model described the observed behavior reasonably well, but, for the coated microstructures, the model predicted a decrease in the inelastic deformation.
DOI
10.1063/1.1736329
Year